Rotary Wafer Etching System-Semiconductor Solutions

EDC System - EDC?Series   

Complete Process Control

We are the Global Leader in Single Wafer Spin Processing Technology.

Established in1985, we have nearly 20,000 systems installed worldwide.

We manufacture the only system that is ETL? listed and certified to CE, CSA? and UL? standards.

What an EDC system does

It is designed to execute an in-situ sequential process, which can be made up of a number of components, in an order which suits the customers process.

Develop

Etch

Clean

The EDC? Series EDC System is compact and packed with advanced features.

PROVEN

Over 12000 systems installed worldwide. We exclusive “Dry In, Dry Out” process ensure the wafer and chemical delivery path are cleaner and dried after every use.

FLEXIBLE

Master Design with more actual processes and substrates supported than all others combined. Capableof in-situ mixing of process chemicals for ultimate flexibility.

SAFE

Interlocks and electronic safety systems combined with the highest quality construction and material use ensure the operator is protected.

Our Expertise at Your Convenience

We have 28 years of experience with our customers’complex process,multiple chemistries,safety issues,waste containment,and disposal issues.

Benefit from our expertise and let us engineer your conventient solution.

Choose a size that fits your substrate:

(The indicated measurements for square substrates are the length of a side)